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Polished chamber lids for a semiconductor tool
Large aluminum lids with a mirror sealing face, cleaned and bagged for the clean room.
Client
Semiconductor equipment OEM
Part
Vacuum chamber lid
Material
Aluminum 6061-T6
Quantity
140 pcs
Tolerance
16 Ra sealing face
Lead time
7 weeks
Result
Clean-room packaged
Industry
Semiconductor equipment
The problem
The lids needed an o-ring groove and sealing face finished to 16 Ra, with no marks from handling after machining.
What we did
We finished the sealing face last with a dedicated fly cutter, handled the lids with gloves on padded carts and cleaned and bagged each one in clean-room film.
The result
140 lids delivered with a surface finish report for each one.
What buyers say after the second order
“
They caught a tolerance stack on our drawing before quoting. That one phone call saved us a failed first article.
Rachel Moreno
Supply chain manager
Regional aircraft supplier
“
We send a model on Monday and have parts on the bench two weeks later. The CMM reports come with every lot.
James Whitaker
Mechanical engineer
Surgical robotics company
“
Datum built production fixtures for our prototypes. When we scaled to 500 a month, nothing had to change.
Priya Natarajan
Head of hardware
Warehouse robotics startup
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